Full equipment list
Fabrication and prototyping tools
The Fabrication and Prototyping Facility has many tools for development of micro- and nanostructured materials and novel device designs. Many of these tools are located in our Class 100 Clean Room.
Lithography
Film deposition and growth
Dry etching
Sample preparation and processing
Characterization
Materials and device characterization tools
The Materials and Device Characterization Facility has many tools to provide detailed structural, compositional and performance characteristics of various materials and devices.
Electron/Ion microscopy
X-Ray crystal structure and surface composition analysis
Materials and device testing
Sample preparation
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Our flexible operations model enables academic and industry users to solve problems at any scale.